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北京怀柔实验室 2023年第二批科研设备采购项目中标结果公告单晶硅外延炉
项目名称:北京怀柔实验室 2023年第二批科研设备采购项目项目编号:1495-234thhrlab02/09招标产品列表(主要设备):单晶硅外延炉 1台 简要技术规格:单晶硅外延炉是一种半导体芯片加工设备,具体规格如下: 1)单晶外延炉1台...
超低温晶圆键合和减薄方法的石英晶圆单晶硅
Single-crystalline silicon films have been prepared on synthetic quartz (fused quartz or quartzglass) substrates by ultr...
氮化铝单晶衬底上的UV LED使用p型硅增加空穴注入
AlGaN based 229 nm light emitting diodes (LEDs), employing p-type Si to signifificantly increase hole injection, were fa...
不同掺杂剂锗硅单晶的张电阻特性
Tensoresistance in single crystals of germanium and silicon with different dopants but under practically equal charge ca...
用激光产生的兰姆波检测单晶硅晶片的裂纹
In the semiconductor industry, with increasing requirements for high performance, high capacity, high reliability, and c...
离子注入和直接晶圆键合的单晶铁电薄膜
Unfortunately, the temperature window of perovskite oxides is rather narrow making the layer transfer a relatively diffi...
单晶金刚石中的低损耗毫米波导和光栅耦合器
We report on the design, fabrication, and characterization of millimeter-length strip waveguides with monolithic grating...
用于高频微加工超声换能器的硅衬底上 PMN-PT 单晶厚膜
In this work, a novel high-frequency ultrasonic transducer structure is realized by using PMNPT-onsilicon technology and...
表面体微加工 (SBM) 工艺:一种在单晶硅中制造释放的MEMS 的新方法
This paper presents the surface/bulk micromachining (SBM) process to allow fabricating released microelectromechanical s...
可转移单晶AlN纳米膜的合成及特性
Single-crystalline inorganic semiconductor nanomembranes (NMs), which have a thickness of less than a few hundred nanom...