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化学处理对太阳级单晶硅片光学和形态性能的影响
Surface texturization is a route to improving the efficiency of silicon solar cells by enhancing their light trapping ab...
单晶硅的完整 3D蚀刻轮廓分析
We have developed an anisotropic-chemicaletching process simulation system, MICROCAD, which is equipped with a database ...
DDMAF化学辅助抛光单晶硅
The need for polishing silicon wafer is to obtain a smooth surface for sprucing the semiconductor devices on the wafer ...
单晶硅纳米结构的金属辅助化学蚀刻技术
Metal-assisted chemical etching (MACE) is a simple, low-cost and versatile method of fabricating various silicon nanostr...
北京怀柔实验室 2023年第二批科研设备采购项目中标结果公告单晶硅外延炉
项目名称：北京怀柔实验室 2023年第二批科研设备采购项目项目编号：1495-234thhrlab02/09招标产品列表(主要设备)：单晶硅外延炉 1台 简要技术规格：单晶硅外延炉是一种半导体芯片加工设备，具体规格如下： 1）单晶外延炉1台...
超低温晶圆键合和减薄方法的石英晶圆单晶硅
Single-crystalline silicon films have been prepared on synthetic quartz (fused quartz or quartzglass) substrates by ultr...
用激光产生的兰姆波检测单晶硅晶片的裂纹
In the semiconductor industry, with increasing requirements for high performance, high capacity, high reliability, and c...
表面体微加工 (SBM) 工艺：一种在单晶硅中制造释放的MEMS 的新方法
This paper presents the surface/bulk micromachining (SBM) process to allow fabricating released microelectromechanical s...
用 NaOH 溶液在单晶硅表面制造倒金字塔结构
ABSTRACT Low-cost aqueous alkaline etching has been widely adopted for monocrystalline silicon surface texturing in cu...
不同后处理工艺条件下单晶硅表面质量及损伤性能的研究
Abstract: Detecting subsurface defects in optical components has always been challenging. This study utilizes laser scat...