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用于微系统封装的 Cu-Sn-In 固液互扩散低温晶圆级键合
ABSTRACT This work demonstrates the potential use of Cu-Sn-In metallurgy for wafer-level low-temperature solid-liquid i...
射频微系统封装工艺技术
Abstract.The 3-D heterogeneous integration technology of microsystem is the best technical means to achieve higher integ...