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硅晶片兆声清洗过程中的去除力分析
Megasonic waves have been extensively used to remove contaminant particles from silicon wafers during manufacturing of s...
氧化 HF 溶液中硅的金属辅助化学蚀刻
Widespread deployment of solar photovoltaics (PVs) is crucial to meeting the world’s growing energy demand and mitigati...
硅基质上残留超纯水滴留下干燥缺陷研究
Watermarks are problematic for nanoelectronics industry. They can appear unexpectedly on wafers after each drying step e...
多晶硅淀积立式炉采购项目国际招标公告
招标项目名称:多晶硅淀积立式炉采购项目招标产品列表(主要设备):多晶硅淀积立式炉1台招标文件领购开始时间:2023-05-04招标文件领购结束时间:2023-05-10开标时间:2023-05-25 09:30招标人:济南市半导体元件实验所...
玻璃晶圆机械性能：与硅的比较
The billion dollar silicon industry is built on the extreme uniformity, chemical, and mechanical strength of perfect cry...
12英寸集成电路用大硅片产业化项目单晶炉采购国际招标公告
招标项目名称:12英寸集成电路用大硅片产业化项目单晶炉采购招标产品列表(主要设备):单晶炉3台、随机附件3套、技术资料3套招标文件领购开始时间:2023-04-28招标文件领购结束时间:2023-05-09开标时间:2023-05-19 0...
深硅等离子体刻蚀机国际招标公告
招标项目名称:深硅等离子体刻蚀机招标产品列表(主要设备):深硅等离子体刻蚀机1招标文件领购开始时间:2023-04-27招标文件领购结束时间:2023-05-08开标时间:2023-05-19 14:00招标人:广东中科半导体微纳制造技术研...
硅片金属污染检测技术比较
In this work we present the results of experiments aimed at comparing the performances of various techniques for the de...
氢氧化钾中硼硅酸盐玻璃的激光辅助蚀刻
Abstract: We present a method for the selective etching of borosilicate glass (SCHOTT Borofloat 33), in which we modify ...
局部湿蚀刻法制备硅玻璃凹微透镜阵列
Abstract: A simple and efficient technique for large-area manufacturing of concave microlens arrays (MLAs) on silica gl...