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硅光子芯片上的微波信号切换
Microwave photonics uses light to carry and process microwave signals over a photonic link. However, light can instead ...
聚硅薄膜上的CMP后新型清洁解决方案
Abstract—In this study, various cleaning solutions containing chelating agents with carboxyl acid group ( COOH), such as...
二氧化硅薄膜的化学蚀刻
Some important factors that affect the dimensional control of oxide films on silicon were studied. Both Nand P -type si...
硅与玻璃晶圆键合的键合能研究
The bonding energy plays a significant role in wafer bonding. The temperature dependence of the bonding energy has been ...
基于硅的多芯片LED封装
Light emitting diodes (LEDs) not only significantly reduce power consumption compared to incandescence, but also with ...
通过硅上集成LED的硅阴影掩模进行半导体沉积
We have recently employed silicon micromachining technology to fabricate an organic semiconductors based light emitted ...
在氮化硅蚀刻期间提高蚀刻选择性的方法
Fabrication of semiconductor devices is a multi-step pro cess of forming features on a semiconductor Substrate or othe...
通过晶圆键合的硅光子学
Photonic integrated circuits offer the potential of realizing low-cost, compact optical functions. Silicon-on-insulator...
用于高性能硅光子电路的浸没式光刻
Large-scale photonics integration has been proposed for many years to support the ever increasing requirements for long ...
具有宽带隙GaN半导体的硅上集成光子学
We report on GaN self-supported photonic structures consisting in freestanding waveguides coupled to photonic crystal wa...