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设计高纵横比硅纳米结构的途径是通过再生二次掩模光刻
Silicon nanostructuring imparts unique material properties including antireflectivity, antifogging, anti-icing, self-cl...
多孔多晶硅壳表面微加工晶圆上的单片封装
In this paper, we present a novel microfabrication technique that solves the main problems of existing monolithic on-chi...
用于太阳能电池应用的倒置纳米金字塔薄晶体硅膜中的高效光捕获
Thin-film c-Si solar cells with light-trapping structures can enhance light absorption within the semiconductor absorbe...
超薄DVS-BCB 将 III-V晶圆、裸片和多个裸片粘合到图案化的绝缘体上硅衬底
Heterogeneous integration of III-V semiconductor materials on a silicon-on-insulator (SOI) platform has recently emerge...
天然氧化物覆盖的硅晶片的氟增强低温晶片键合
The bonding energy of bonded native-oxide-covered silicon wafers treated in the HNO3 /H2O/HF or the HNO3 /HF solution pr...
硅太阳能电池的红外线研究
Increasing reliance on carbon-based fossil fuel is likely to cause irreversible damage to global environment. Crystallin...
硅异质结太阳能电池中掺杂纳米晶硅集成的策略
Carrier collection in silicon heterojunction (SHJ) solar cells is usually achieved by doped amorphous silicon layers of ...
硅晶片的激光清洗：机制和效率
We report on experiments on the underlying physical mechanisms in the Dry- (DLC) and Steam Laser Cleaning (SLC) process....
近场致缺陷及对硅片蒸汽激光清洗液层厚度的影响
The removal of particles from commercial silicon wafers by Steam Laser Cleaning was examined. Polystyrene colloids were ...
小尺寸和超薄MEMS 封装，通过硅帽的转移键合实现晶圆级真空密封
Vacuum and hermetic packaging is a critical requirement for optimal performance of many micro-electromechanical systems ...