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直流磁控溅射在蚀刻硅基板上沉积的 ZNO 薄膜的 SEM 和 AFM 形貌研究
In this work, ZnO films were deposited by Direct Current (DC) magnetron sputtering, on polished silicon substrate Si(100...
通过晶体硅微加工形成横向分形
A novel wafer-scale silicon fractal fabrication method is presented here for forming pyramids only in the lateral direct...
碳化硅同质外延生长炉国际招标公告
招标项目名称:碳化硅同质外延生长炉招标产品列表(主要设备):碳化硅同质外延生长炉1招标文件领购开始时间:2023-11-09招标文件领购结束时间:2023-11-16开标时间:2023-11-30 14:00招标人:中电化合物半导体有限公司...
用于晶圆清洗工艺评估的测试硅晶圆的老化效果
This paper presents an experimental study of the aging of contaminated testwafers prepared for particle removal (cleanin...
激光振荡能量对硅片纹理化的影响，以增强光伏电池的吸收
The influence of the Nd:YAG laser’s oscillation energy on creating textured surfaces on silicon wafers is investigated i...
旋涂法沉积氧化铝薄膜c硅片表面钝化
In the present work, alumina gel was developed for passivating silicon wafers. The alumina gel was prepared by sol–gelme...
用于集成电路的硅基介电薄膜的高密度等离子体化学气相沉积
The chemical vapor deposition (CVD) of undoped and doped silicon-based dielectric layers plays akey role in the microele...
微电子芯片和太阳能电池硅片加工的生命周期评估
Purpose The life cycle assessment of silicon wafer processing for microelectronic chips and solar cells aims toprovide c...
使用不同表面纹理参数的硅片表面反射率研究
This paper discusses surface texturization ofmonocrystalline silicon wafer h100i by using a very simpleand cost effectiv...
局部蚀刻电热原子吸收光谱法测定硅片中的金属杂质
An etching technique for the determination of the metallic impurities distribution in silicon wafers has been developed....