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在 HF-乙醇和 HF-乙醇-H2O 溶液中通过电化学蚀刻技术制备 P 型纳米多孔硅
Nano-porous silicon were simply prepared from p-type single crystalline silicon wafer byelectrochemical etching techniqu...
用电接枝聚合物绝缘子抑制硅中残余应力的高纵横比TSV的湿金属化
Through-Silicon-Vias (TSV) are the key to 3Dintegrated microsystems. Their fabrication leads to reliabilityissues linked...
通过各向异性化学SiO 2系微悬臂梁的制造蚀刻（100）的单个结晶硅
The undercutting process of thermal SiO2 microcantilevers with differentorientations on (100) Si wafer was studied. The ...
用于外延应用的原位低温硅表面清洁的氯蚀刻
Oxygen-free silicon surfaces are desired for high quality silicon epitaxy.Conventionally, to achieve oxygen-free and car...
化学蚀刻的硅：IV蚀刻技术
The etching of silicon in HNOg-HF based systems proceeds by a sequen-tial oxidation-followed-by-dissolution process. In ...
硅湿化学各向异性蚀刻中蚀刻速率最小值的形式
Etching of monocrystalline silicon in alkaline based solutions leads to adeep minimum in the etch rate crystallographica...
硅纳米加工中KOH湿法蚀刻工艺的优化
The simple wet etching process for nanostructureformation seems straightforward. But, how far the wetetching process can...
晶圆级自清洁抗反射硅表面的简单方法
A simple approach to wafer-scale self-cleaning antireflective hierarchical silicon structures is demonstrated. Byemployi...
12英寸硅基OLED项目国际招标公告(伽马校正机)
招标项目名称:12英寸硅基OLED项目招标产品列表(主要设备):伽马校正机1台招标文件领购开始时间:2023-11-28招标文件领购结束时间:2023-12-05开标时间:2023-12-19 10:00招标人:云南创视界光电科技有限公司云...
华虹半导体制造（无锡）有限公司12英寸集成电路制造项目中标结果公告（硅片倒片机）
项目名称：华虹半导体制造（无锡）有限公司12英寸集成电路制造项目项目编号：0705-234023603825招标范围：华虹半导体制造（无锡）有限公司12英寸集成电路制造项目招标机构：上海国际招标有限公司招标人：华虹半导体制造（无锡）有限公司...