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长期次氯酸钠清洗对低压化学气相沉积碳化硅超滤膜的影响
Abstract: Sodium hypochlorite (NaClO) is widely used for the chemical cleaning of fouled ultrafiltration (UF) membranes....
用于硅片翘曲估计的多步机械和热均质化
Abstract: In response to the increasing demand for high-performance capacitors, with a simultaneous emphasis on minimizi...
采用背面腔蚀刻的硅微环谐振器的热优化
Abstract—Silicon ring resonators on SOI substrates are well known and widely studied. They are commonly used in datacom...
不同后处理工艺单晶硅表面质量及损伤特性的研究
Abstract: Detecting subsurface defects in optical components has always been challenging. This study utilizes laser scat...
电化学方法实现的纳米多孔硅材料及其应用
ABSTRACTNanoporous materials have attracted extremely intense scientific attraction since the photoluminescence discover...
高硼掺杂硅衬底上多晶硅薄膜的制备及其对Cu外扩散的影响
The behavior of copper (Cu) diffusion at different storage temperatures of heavily boron-doped silicon substrates is inv...
太阳能电池的湿法化学多晶硅 (n) 环绕去除
Abstract. This work gives an overview on different technological solutions for polysilicon removal in industrial tunnel ...
通过热回流和 ICP蚀刻制造大面积硅球形微透镜阵列
Abstract: In this paper, we proposed an efficient and high-precision process for fabricating large-area microlens arrays...
硅孔光学器件
Abstract Silicon Pore Optics (SPO) uses commercially available monocrystalline double-sided superpolished silicon wafers...
硅的 Al2O3 表面钝化的激活：分离体效应和表面效应
ABSTRACT Understanding surface passivation arising from aluminium oxide (Al2O3) films is of significant relevance for s...