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硅中的负载效应对超透镜纳米级图案的影响
This work studies the impact of the silicon (Si) loading effect induced by deep reactive ion etching (DRIE) of silicon m...
现代碳化硅功率器件
Modern society has become increasingly reliant upon electrical appliances for comfort, transportation, and healthcare. ...
用于异质结制造的硅衬底上碳化硅的等离子体诱导生长
AbstractIn this work, p-type silicon substrates were etched and coated with graphite paste to form layers of n-type sil...
硅孔光学元件
Abstract Silicon Pore Optics (SPO) uses commercially available monocrystalline double-sided superpolished silicon wafers...
利用硅基玻璃上的 DRIE 技术制造低谐振频率惯性MEMS
This paper reports on a fabrication process suitable for ultra-low resonant frequency inertial MEMS sensors. The low res...
低温下在硅晶片上进行单步碳化硅异质外延
ABSTRACT A single step growth approach for wafer-scale homogeneous cubic silicon carbide (3C-SiC) heteroepitaxy, using ...
高取向热解石墨上硅和锗的外延生长
Abstract: Two-dimensional silicon (silicene) and germanium (germanene) have attracted special attention from researchers...
采用不同后处理工艺对单晶硅表面质量和损伤特性的研究
Abstract: Detecting subsurface defects in optical components has always been challenging. This study utilizes laser scat...
利用背面腔蚀刻对硅微环谐振器进行热优化
Abstract—Silicon ring resonators on SOI substrates are well known and widely studied. They are commonly used in datacom...
高通量在线硅晶圆检测中的定量剪切应力成像
ABSTRACT Defect inspection methods are basic steps in electronic chip manufacturing and power device production process...