多孔硅的导热率、光导率和电导率的变化

时间:2023-05-25 16:46:42 浏览量:0

Porous silicon (PS) was prepared by electrochemical etching method. Mirage effect in transverse photothermal deflection  PTD ( skimming configuration) was used to determine thermal conductivity the experimental results of PS thermal conductivity  was compared with theoretical results they were almost the same. Optical extinction coefficient and absorption coefficient were  calculated from transmittance T and reflectance R curve which measured with UV-Vis-NIR Spectrophotometer, and they were  used to calculate the optical conductivity and electric conductivity from the Shankar and Joseph equations, and optical  conductivity and electric conductivity were studied with porosity in porous silicon.


Porous silicon has attracted considerable research  interest after their discovery in 1956. Low-dimensional  materials are finding ever-widening application in many areas  of science and Engineering. Nanostructured porous  silicon shows a variety of other interesting properties,  including tunable refractive index, tunable energy gap, low  light absorption in the visible, high internal surface, variable  surface chemistry, or high chemical reactivity. Properties,  along with its ease of fabrication and the possibility of  producing precisely controlled layered structures make this  material adequate for its use in a wide range of fields, such as  optics, micro- and optoelectronics, chemical sensing or  biomedical applications .


Porous silicon samples were prepared by electrochemical  etching method of p-type cubic silicon wafers (c-Si), (100)  orientation with resistivity of 0.01-40 Ω·cm, electrochemical  dissolution of Si wafers is used: HF-ethanol (measured by  volume) aquas with concentration from 20% . The current  density was always kept Constant for each sample during  etching of PS (10,..,50 mA/cm2).Fabricating process done in a normal etching Teflon cell fig(1). After anodization, PS  samples are carefully removed from the bath and cleaned in  deionized water . Few examples of AFM measurement is  presented to show differences between samples according to  preparing current (fig.2).


图片2

Fig1


Porosity is defined as the fraction of void within the  porous silicon PS layer and can be determined easily by  weight measurements. The virgin wafer is first weighed  before anodisation (m1), then just after anodisation (m2) and  finally after dissolution of the whole porous layer in a molar  KOH aqueous solution (m3). the removal is made through a dip for some minutes in an  aqueous solution of KOH (3% in volume), that leads to a  selective removal of the PS layer without reacting with the  bulk crystalline silicon. 


Different techniques are employed to determine the porous  layer thickness d. From the gravimetric measurements, where is the silicon density and S the etched surface.


The decreasing in Thermal conductivity is attributed to that:  The solid contribution is normally significantly higher than  that of the gas contained in the pores, and thus, the gaseous  conduction contribution is considered to be negligible. The  radiative contribution, krad, is derived from heat radiated  throughout the pores, and is highly dependent on the  porosity, pore size, and temperature. For all that reasons  thermal conductivity in bulk silicon is higher than that of PS samples. fig(4) shows the measured and theoretical  calculated thermal conductivity of PS sample they are  almost the same.


Porous silicon samples were prepared by electrochemical  etching method , HF-ethanol concentration from 20% ,The  current density was (10,..,50 mA/cm2 ).Fabricating process  done in a normal etching Teflon cell, Mirage effect in  transverse photothermal deflection PTD ( skimming  configuration) is used to determine effective thermal  conductivity . It changed from 120W/Mk for 8% porosity to  47.2 W/Mk for 69 % porosity. Experimental results of PS  thermal conductivity with porosity was compared with  theoretical results and it was almost the same . Absorption  coefficient was calculated from transmittance T and  reflectance R curve measured with UV-Vis-NIR  Spectrophotometer was used to calculated extinction  coefficient then to calculate electric conductivity and optical  conductivity, our work shows that absorption coefficient and  the extinction coefficient decreases with porosity increases.  So is electric conductivity, while optical conductivity remains  constant in rang of our porosity.

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